- Non-Contact - Easy to Use
- Fast Roughness Measurement
- Sub-nanometer - High Resolution
- Microscopic technology dedicated to the reproduction of tiny surface features up to the physical limit.
- Video real time surface scanning technology for fast and reliable results.
- Robust, maintenance free, long-lived construction.
- Complete assortment of premium quality objectives available
- Measurement of topography, height, shape and position an other parameters
Surface scanning sensor ideally suited for fast-paced measurement of smallest to medium sized surface details, like roughness measurement in sub-nanometers. Excellent, high resolution reproduction of
even microscopic surface details.
Technical Data
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Measuring principle
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By interferometer, by white light interferometer
Light source (WLI): LED, 505 nm |
|---|---|
|
Measuring range mm
|
Sensor unit can be moved manually over 200 mm in Z
Object table can be moved manually in X and Y Interferometer, white light interferometer: Measuring range (WLI): Up to 100 µm (vertical). More on request. |
|
Interfaces
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230 V, 50 Hz
|
US 7001 
BR 4194 
CA 1678 
TH 1597 
AU 1584 
JP 1471 
SG 1211 
VN 1181 
