Product Overview

The SE-1000 provides modularity and high measurement performance in a compact tabletop footprint. This tool includes a manual goniometer and manual sample positioning, making it ideal for R&D laboratories.

Evaluate substrates, single-layer, and multi-layer samples with precision. The SE-1000 extracts individual thin-film thickness and complex optical constants (n, k) using non-contact optical techniques. Built with interchangeable smart electronics and operating on the advanced SAM/SEA software suite, it ensures longevity and state-of-the-art analytical power for materials research.

Key Specifications

System Parameters
Footprint Compact Tabletop Manual System
Hardware Manual Goniometer & Sample Stage
Electronics Smart Interchangeable Components
Software Next-Gen SAM/SEA Suite
Connectivity PC/Laptop via LAN Network
Interface Optional Touch Panel Interface

Core System Features

 
Optical Accuracy

Utilizes rotating compensator technology to achieve high-precision spectroscopic measurements on a wide range of materials.

 
Complex Mapping

Supports Generalized Ellipsometry for anisotropic samples, providing detailed structural insights that standard tools miss.

 
Advanced Matrix

Measures Mueller matrix (11 coefficients) and Jones matrix for complete polarimetric characterization of thin films.

 
Smart Platform

Features modular smart electronics, allowing for easy maintenance and future-proof component swaps as technology evolves.

 
Porosimetry Analysis

Determines pore size distribution and total porosity in thin films, a critical capability for advanced material science.

 
In Situ Monitoring

Equipped with a real-time measurement mode for active control during deposition or etching processes.

Technical Specifications

Technical Parameter Specification Detail
Measurement Technology Spectroscopic Ellipsometry with rotating compensator
Goniometer Type Manual adjustment for Angle of Incidence (AOI)
Sample Stage Manual X-Y sample positioning for R&D flexibility
System Architecture Modular Smart Electronics with interchangeable parts
Operating System New generation SAM/SEA analysis software suite
Control Interface PC control via LAN or Integrated Touch Panel
Matrix Support Mueller matrix (11 coefficients) and Jones matrix
Extracted Values Thickness, Refractive Index (n), Extinction Coefficient (k)
Real-time Control In situ measurement mode for process monitoring
Spectral Range Optional Near-infrared (NIR) spectral extension

Primary Applications





Thin Film Metrology

Precise determination of film thickness and complex optical constants for research-grade semiconductor materials.

Porosimetry Analysis

Measurement of pore size distribution and total porosity in advanced thin-film structures for energy and filtration research.

In Situ Monitoring

Real-time measurement and control during deposition or etch processes to ensure process consistency and precision.

Technology & Performance Highlights

NIR Spectral Extension
The system can be extended into the Near-Infrared (NIR) region, providing the spectral versatility needed for a wider range of materials, including complex organic electronics and low-bandgap semiconductors.
Environmental Versatility
Integration with liquid cells and cooling/heating stages facilitates the study of material behavior under varied environmental conditions, essential for phase transition and surface chemistry research.
Precision Visualization
Optional visualization cameras and microspot capabilities allow for pinpoint accuracy when measuring specific regions on patterned or non-uniform sample surfaces.
Atmospheric Porosimetry
Provides unique atmospheric thin film porosimetry capabilities, allowing researchers to evaluate porous material properties without the need for vacuum environments.