The Agilent CDG-500 series of temperature compensated Capacitance Diaphragm gauges provides a high level of accuracy in the high-pressure region. Full-scale measurement ranges are available from 1000 Torr to 1 Torr. The CDG-500 series uses a corrosion resistant ultra pure alumina ceramic diaphragm providing exceptional signal stability, fast recovery from atmosphere, short warm-up times and unparalleled robustness.
Features
Specifications| CDG500T1000KF16 | CDG-500, capacitance diaphragm gauge, 1000 Torr, KF16 |
| CDG500T0010VCR8 | CDG-500, capacitance diaphragm gauge, 10 Torr, VCR8 |
| CDG500T0001VCR8 | CDG-500, capacitance diaphragm gauge, 1 Torr, VCR8 |
| CDG500T0100KF16 | CDG-500, capacitance diaphragm gauge, 100 Torr, KF16 |
| CDG500T0100VCR8 | CDG-500, capacitance diaphragm gauge, 100 Torr, VCR8 |
| CDG500T0001KF16 | CDG-500, capacitance diaphragm gauge, 1 Torr, KF16 |
| CDG500T0010KF16 | CDG-500, capacitance diaphragm gauge, 10 Torr, KF16 |
| CDG500T1000VCR8 | CDG-500, capacitance diaphragm gauge, 1000 Torr, VCR8 |
| CDG500T0010KF16S | CDG-500 capacitance diaphragm gauge, 10 Torr, with setpoints, KF16 |
| CDG500T0100VCR8S | CDG-500 capacitance diaphragm gauge, 100 Torr, with setpoints, VCR8 |
| CDG500T1000KF16S | CDG-500 capacitance diaphragm gauge, 1000 Torr, with setpoints, KF16 |
| CDG500T0100KF16S | CDG-500 capacitance diaphragm gauge, 100 Torr, with setpoints, KF16 |
| CDG500T0001VCR8S | CDG-500 capacitance diaphragm gauge, 1 Torr, with setpoints, VCR8 |
| CDG500T0001KF16S | CDG-500 capacitance diaphragm gauge, 1 Torr, with setpoints, KF16 |
| CDG500T0010VCR8S | CDG-500 capacitance diaphragm gauge, 10 Torr, with setpoints, VCR8 |
| CDG500T1000VCR8S | CDG-500 capacitance diaphragm gauge, 1000 Torr, with setpoints, VCR8 |
Features
- Full scale ranges from 1 to 1000 Torr with push button zeroing and optional set point control providing ease of integration
- Excellent long term signal stability and repeatability
- Fast recovery from atmospheric pressures and rapid stabilization after start-up reduces process cycle times
- Application robustness is achieved through a corrosion-resistant ceramic sensor with sensor-shielding protection
Technical Specifications
| Measurement range (full scale) | Torr | 1000 | 100 | 10 | 1 | |||
| Pa | 133,322 | 13,332 | 1,333 | 133 | ||||
| mbar | 1333 | 133 | 13.3 | 1.3 | ||||
| % of reading | 0.2 | 0.2 | 0.2 | 0.2 | ||||
|
Temperature effect On zero |
On zero | % F.S. / °C | 0.005 | 0.005 | 0.005 | 0.015 | ||
| On span | % of reading/ °C | 0.01 | 0.01 | 0.01 | 0.01 | |||
| Resolution | % F.S. | 0.003 | 0.003 | 0.003 | 0.003 | |||
| Pressure, maximum | kPa (absolute) | 400 | 260 | 260 | 260 | |||
| Lowest reading | % F.S. | 0.01 | ||||||
| Lowest suggested reading | % F.S. | 0.05 | ||||||
| Lowest suggested control pressure | % F.S. | 0.05 | ||||||
| Temperature | Operation (ambient) |
Bakeout (at flange)2 |
Storage | |||||
| 5 to 50 °C | <110 °C | –40 to 65 °C | ||||||
| Supply voltage | 14 to 30 VDC | |||||||
| Power consumption | <1 W | |||||||
| Output signal (analog) | 0 to 10 VDC | |||||||
| Response time | 30 ms | |||||||
| Degree of protection | IP30 | |||||||
| Electrical connection | D-sub, 15 pole, male | |||||||
| Setpoints3 – Two (2) setpoints, SP 1 and SP 2 | Relay Contact | Hysteresis | ||||||
| 30 VDC; <0.5 ADC | 1% of F.S | |||||||
| Materials exposed to vacuum | Aluminum oxide ceramic (Al2O3), Vacon 704, stainless steel (AlSl 316L5) AgCuTi hard solder, sealing glass | |||||||
1 Non-linearity, hysteresis, repeatability at 25°C ambient operating temperature without temperature effects after 2 hours operation
2 Non-operating
3 CDG-500 setpoint versions only
4 28% Ni, 23% Co, 49% Fe
5 18% Cr, 10% Ni, 3% Mo, 69% Fe
Outline Drawing
MY 1621 
US 1220 
AP 267 
CN 150 
AU 100 
CA 73 
IE 70 
GB 70 
