- High precision - non-contact measurement of surface structures
- Your results are correct!
- Fast measurement - short measuring time
- For measurements on technical, optical and reflecting surfaces as well as on printed circuit boards (semiconductor industry) a 3D topographical analysis (areal measurement) with high information density is required. Soft and thin-walled materials also require non-contact measurement. Moreover, ever higher levels of surface quality are being achieved, greatly increasing the requirements placed on measuring systems in terms of resolution and measuring accuracy.
- Highly accurate and non-conatct measurement of surface structures.
- High precision with sub-nanometer resolution
- Main application field for the confocal sensor is the measurement of rough and dark surface structures and small components.
- Main application field for the white light interferometer is the measurement of fine, polished and shiny surface structures including glass and optical surfaces
- Microscope field of view, easily enlargeable by fully automated stitching procedure
Technical Data
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Measuring principle
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By interferometer, by white light interferometer and confocal
Light source (KFM and WLI): LED, 505 nm |
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Measuring range mm
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Sensor unit can be moved 100 mm in Z, CNC controlled
Object table can be moved 100 mm in X and Y, CNC controlled Interferometer, white light interferometer: Measuring range (WLI): More as 4 mm (Standard mode), more as 20 mm in extended mode Confocal microscope: Measuring range (KFM): Up to 10 mm (depending on resolution in Z and lens) |
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Interfaces
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230 V, 50 Hz
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US 6437 
BR 3808 
VN 2667 
AU 1352 
TH 1336 
JP 1266 
SG 896 
CA 697 
