- Video system: High Resolution & High Accuracy CCD
- Magnification: 0.3x~1.8x (10x~60x) Step lens
- Illumination: Adjustable surface and contour illumination
- Linear scale: 0.5μm on X, Y-axis
- Length accuracy: ± (3+L/75) μm
- Repeatability: 3μm
- Connection: USB Output + Metrology software
- Software: SI-102 (Optional:SI-101)
- Monitor: 17 inch touch panel
Specification
| Travel – X, Y Axis | : | 200 x 100mm |
| Focus Distance | : | 150mm |
| Stage Size | : | 200 x 120mm |
| Stage Load Capacity | : | 25kg |
