- Wet-type exhaust abatement system
- Multiple gas batch processing
- Countermeasures against by-products
- Long-term maintenance interval
- Low running costs
- Low initial costs
- Possible to deal with CE marking/SEMI-S2/NRTL
Features and Benefits
Is a wet-type exhaust abatement system that can be installed and operated with a low cost. It requires no fuel and a long-term maintenance cycle is realized based on Ebara's unique countermeasures against by-products that have been cultivated in combustion-type exhaust abatement systems for more than ten years. High uptime contributes to stable operation and reduction of maintenance costs and labor.
In addition, the maintenance space is in the front of the device only. A flexible layout is possible even for limited sub-fab space.
Gas to be treated: Water-soluble gas, such as NH3, DCS, TiCl4, WF6, HF, and HCl, which can be treated at room temperature
Specifications
| Model | Units | G-WS1000 | |
| Maximum treated air volume | L/min | 1,000 | |
| Number of connected inflow entrances | 4 | ||
| External dimensions | mm | W 914 x D 736 x H 1,727 | |
| Power use | Water quantity | L/min | 1 - 10 |
| Displacement | L/min | 1 - 10 | |
| Nitrogen | L/min | 15-50 | |
| Power supply | 1.8-3.5 kW, three-phase AC 200 V (50/60 Hz) | ||
| Exhaust duct (treated gas) | m3/min | 1.5 | |
| Exhaust duct (housing exhaust) | m3/min | 1.3 | |
| Main processable gases | Epi | HCl, DCS | |
| CVD | WF6, NH3, TiCl4, BCl3, ClF3, SiF4, Cl2*, F2* | ||
| Etching | BCl3, HCl, HF, HBr, SiF4, Br2*, Cl2*, F2* | ||
| Asher | NH3 | ||
| Gases that cannot be treated by wet-type | H2, SiH4, PH3, GeH4, CH4, PFCs (CF4, SF6, NF3) etc. | ||
| * Please contact Ebara when treating | |||
