DLS-1100 Deep Level Transient Spectrometer

Description:

 

The DLS‑1100 is Semilab’s most sensitive deep‑level transient spectrometer, tailored for industrial quality control and advanced R&D. Featuring a low‑vibration cryostat, enhanced temperature control, and automatic data acquisition software, it detects electrically active defects and impurities down to ~5×10⁷ atoms/cm³ with minimal user input.
 

Features:

1. Ultra-high sensitivity detection

2. Low-vibration cryostat

3. Precise temperature control

4. Fully automated operation

5. Multiple measurement modes

6. WinDLS software with built-in trap database

Application:

Parallel Dipole Line Hall Measurement
The DLS‑1100 uses advanced Deep Level Transient Spectroscopy (DLTS) to identify and quantify electrically active impurities and defects in semiconductor materials. By analyzing activation energy and capture cross-section, it helps trace contamination sources and process-related defects, enabling manufacturers to improve material quality and optimize production—down to ultra-low impurity levels.