Infex 10 Series Integrated Roughness and Contour Measuring Instrument
Cost-effective roughness and contour one time measurement solution.
Adopt high rigidity, high accuracy, maintenance-free linear motion guide rail, can control the measuring system with high precision performance.
Cost-effective roughness and contour one time measurement solution.
Adopt high rigidity, high accuracy, maintenance-free linear motion guide rail, can control the measuring system with high precision performance.
Technical Specification
| Model | Infex 10 | |
| Column | Measuring range | 0-620mm optional |
| Drive unit | Measuring range | 0-220mm optional |
| Indicating accuracy | ±(0.8+2L/100)μm | |
| Straightness | ≤0.3μm/100mm | |
| Detector | Measuring range | ±10mm |
| Z1 axis contour indicating accuracy | ≤±(0.8+|0.12H|)μm | |
| Z1 axis roughness indicating accuracy | ≤±(8nm+3.5%) | |
| Repeatability | 1δ≤2nm | |
| Residual noise | ≤0.012μm | |
| Stylus | Standard,diamond 5μm/90° | |
| Measuring accuracy | Arc | ≤±(1.2+R/12)μm |
| Arc Pt | ≤±0.3μm | |
| Angle | ≤±1′ | |
