The MarSurf UD 130 closes the gap between the high-end solution MarSurf LD 130/LD 260 and the new standard combination measuring station MarSurf VD 140/280 with two probe systems.
The technical specifications of the MarSurf UD 130 are based on the interferometric probe system and the positioning speeds that reduce the measuring time for each workpiece.
Technical Data
|
Resolution
|
2 nm
|
|---|---|
|
Start of traversing length (in X)
|
0.1 mm
|
|
End of traversing length (in X)
|
130 mm
|
|
Positioning speed
|
0.1 mm/s to 30 mm/s
|
|
Measuring speed
|
0.1 mm/s to 5 mm/s;
for roughness measurements 0.1 mm/s to 0.5 mm/s are recommended |
|
Probe
|
Standard probe LP-D 14-10-2/60°
|
|
Measuring range mm
|
10 mm (100 mm probe arm) |
|
Profile resolution
|
2 nm
|
|
Traversing lengths
|
0.1 mm to 130 mm
|
|
Measuring force (N)
|
1 mN to 30 mN, software-adjustable
|
US 6928 
BR 4262 
CA 1626 
AU 1568 
TH 1543 
JP 1389 
VN 1203 
SG 1144 
