Model

SURFCOM 2800G/1800G

-11

-12

-13

-14

-21

-22

-23

-24

Measuring Range

Z-axis (vertical)

50mm

X-axis (horizontal)

100mm

200mm

Accuracy

S1800G Series

Roughness

Measuring Range

800µm range to 25µm range (6.4µm range) (*3)

Resolution

0.02µm to 0.0004µm (0.0001µm) (*3)

Contour

Z-axis Indication Accuracy (Vertical)

±0.25% (full scale)

Resolution

0.1µm/5mm range, 0.4µm/20mm range, 1µm/50mm range

S2800G Series

Roughness

Measuring Range

800µm range to 25µm range (6.4µm range) (*3)

Resolution

0.02µm to 0.0004µm (0.0001µm) (*3)

Contour

Z-axis Indication Accuracy (Vertical)

±(0.8 + l2Hl/100)µm (H: Measuring Height mm)

Resolution

0.025µm/Full range

Common Item

X-axis Indication Accuracy (Horizontal)

±(1 + 2L/100)µm (L: Measuring Length mm)

Resolution

0.04µm

Tracing Driver

Straightness Accuracy

Roughness

0.05 + 1.5L/100)µm (L: Measuring Length mm)

Contour

1µm/100mm

2µm/200mm

Sensing Method

Moire stripped scale

Linear scale

Measuring Speed

0.03, 0.06, 0.15, 0.3, 0.6, 1.5, 3, 6 mm/s (8 speeds)

Column up/down speed (Z-axis)

–

10mm/s (3mm/s) (*1)

–

10mm/s (3mm/s) (*1)

Detector

Sensing Method

S1800G

Roughness

Differential transducer

Contour

S2800G

Roughness

Contour

Laser optical diffraction scale

Roughness Measurement

Stylus, measuring force

Replaceable, 0.75mN

Stylus radius (material)

Roughness: 2µmR (60° conical diamond)   Waviness: 800µmR (Ruby Ball)   Each stylus equipped as standard

Contour Measurement

Stylus, measuring force, function

Replaceable, 10mN to 30mN, and stepless (retraction) function

Stylus radius (material)

25µmR (24° conical carbide)   Two pieces equipped as standard

Measuring direction, position

Pull/push and Up/down directions, Max. following angle: 77°

Operation Range

Tracing driver stroke

100mm

200mm

Column up/down stroke

250mm

450mm

250mm

450mm

Granite Table

Dimension

600 x 317mm

1000 x 450mm

600 x 317mm

1000 x 450mm

Permissible loading weight

In use of desktop anti-vibration table (E-VS-S57B/S58B)

40kg

34kg

25kg

–

34kg

28kg

19kg

–

In use of large size desktop anti-vibration table (E-VS-S45A)

50kg

40kg

30kg

90kg

50kg

40kg

30kg

84kg

In use of anti-vibration table (E-VS-R16B)

50kg

40kg

30kg

40kg

50kg

40kg

30kg

34kg

In use of anti-vibration table (E-VS-R21B)

50kg

40kg

30kg

100kg

50kg

40kg

30kg

100kg

Other

Installation Dimension (*2)

Width

2000mm

2300mm

2000mm

2300mm

Depth

1000mm

1000mm

Height

1700mm

1900mm

1700mm

1900mm

Weight

120kg

125kg

135kg

240kg

125kg

135kg

140kg

245kg

Power Supply, frequency consumption

Single phase AC 100V ±10% (grounding required), 50Hz/60Hz, 710VA