Small, energy-saving, and capable of covering a wide range of processes by one unit

• Suitable for mediumduty processes
• Suitable for high-temperature control
• Energy saving
• Reduced footprint
• Corrosion-resistant materials
• Option for increased corrosion resistance
• Same performance with different frequencies (50 Hz/60 Hz)
• Oil-Free
• CE marking/SEMI-S2/NRTL

Features and Benefits

This dry vacuum pump is for medium duty processes, equipped with Ebara's unique energy-saving technology, adopting a module design optimized for manufacturing in automated plants and realizing further miniaturization and energy saving.

With wide-range temperature control capability it extends the applicable processes. The same model can cover multiple processes; therefore, spare machine inventory can be optimized, maintenance and training can be reduced and processes can be expanded flexibly in the future. In addition, process resistance is improved by optimum temperature control for each process, and TCoO is reduced by extending the replacement cycle of parts.
Applicable applications include various etching and CVD, ashing, ion implantation, epitaxy, etc.

Specifications