Specification :

Model		NS-3600
Objective Lens	Magnification	10X	20X	50X	100X
Observation / Measuring Range	Horizontal (H), um	1400	700	280	140
	Vertical (V), um	1050	525	210	105
Working Distance, mm		17.5	4.5	1.0	1.0
Numerical Aperture (N. A.)		0.30	0.45	0.80	0.90
Optical Zoom		x1 to x6
Optical system for observation / measurement		Pin hole confocal optical system
Height Measurement	Scan Range	10 mm
	Display Resolution	0.001 um
	Repeatability, σ	0.02 um (100 times measurement of 1 um step height standard sample using 100X/0.9 objective)
Width Measurement	Display	0.001 um
	Repeatability, 3σ	0.03 um (100 times measurement of 5 um pitch standard sample using 100X/0.9 objective)
Frame Memory	Pixel Count	1024x1024, 1024x768, 1024x384, 1024x192, 1024x96
	For monochrome image	12 bit
	For color image	8 bit for RGB each
	For height measurement	16 bit
Frame rate	Surface Scan	20Hz to 160Hz
	Line Scan	~ 8kHz
Laser beam light source for confocal measurement	Wavelength	Red laser, 638 nm
	Output	~ 2mW
	Laser class	3b
Laser light receiving element		PMT (Photo Multiplier Tube)
Light source for optical observation	Lamp	LED
Color camera for optical observation	Imaging element	Color CCD image sensor
	Recording Resolution	1296 x 966
Data Processing unit		Dedicated PC
Power Supply	Voltage	100 to 240 VAC, 50/60 Hz
	Current	500 VA max
Weight	Microscope	~ 50kg (measuring head unit : ~ 12.5kg)
	Controller	~ 8 kg
Vibration Isolation System		Pneumatic Isolator (optional)