• A unique measuring microscope with one objective above the measuring stage like any conventional measuring microscope and another objective installed below the measuring stage.
• The “Two objective, single Camera” design allows top and bottom image to be viewed separately or combined to output on one display.
• Widely used for top and bottom image pattern comparison, top and bottom image pattern matching inspection.
• Top and bottom pattern offset and miss-match can also be measure accurately
• Resolution : 1um, 0.5um, 0.1um
• Stage travel : 100 x 100mm, 150x150mm and 300mm x 150mm
• No Sample flipping required for top and bottom surface pattern comparison or measurement.
• Objective : 3x, 5x, 10x, 20x, 40x, 100x objective