- XYZ measuring microscope with Precise Focus Indicator or target mark for high Z-axis repeatability
- Resolution : 1um, 0.5um, 0.1um
- Stage travel : 50x50mm, 100x50mm, 200x100mm, 250 x 100mm, 150x150mm, 300x300mm
- Display in digital Readout counter or PC with metrology software
- 3x, 5x, 10x, 20x, 40x, 100x objective.
- Popular and effective for semiconductor application like wire loop height, die attach height, die placement, BGA ball height, ball diameter, epoxy height, all lead frame XYZ measurement, etc.




