- Better performance with less power consumption
- Saves energy while creating less heat, which improves reliability
- Optimized cooling fins for air-cooling
- Further improves reliability by lowering operating temperature
- Optimized geometry of Turbo-V 81-M MacroTorr stages
- Lower power requirements with improved tolerable foreline pressure and sustainable throughput
- Dismountable foreline connector
- Great versatility in connecting to the forepump
- Flexibility of cooling choices (air or water)
- Utilizes Agilent's T-plus Software
Specifications
|
Pumping speed ISO 160: CFF 10” or ISO 200: ISO 250: |
N2: 790 l/s N2: 950 l/s N2: 1,050 l/s |
He: 820 l/s He: 870 l/s He: 900 l/s |
H2: 860 l/s H2: 900 l/s H2: 920 l/s |
|
Compression ratio ISO 160 CF 10”/ISO200 - ISO250 |
N2: 1 x 109 N2:1 x 109 |
He: 1 x 107 He: 1 x 107 |
H2: 1 x 106 H2: 1 x 106 |
|
Base pressure* (with minimum recommended forepump) |
<1 x 10-10 mbar (< 1 x 10-10 Torr) | ||
| Inlet flange | ISO 160 / ISO 200 ISO 200-F bolted / CF 10” / ISO 200 / ISO 200-F bolted | ||
| Foreline flange | KF40 | ||
| Rotational speed | 38,000 rpm | ||
| Start-up time | < 4 minutes | ||
| Recommended forepump |
Mechanical: Varian DS 402 Dry scroll: Varian TS300 |
||
| Operating position | Any | ||
| Cooling requirements | Forced air or water | ||
| Bakeout temperature |
120 °C at inlet flange max. (CF flange) 80 °C at inlet flange max. (ISO flange) |
||
| Vibration level (displacement) | <0.01 μm at inlet flange | ||
|
Weight kg (lbs): ISO 160 flange ISO 200 flange CF 10” flange ISO 250 flange ISO 200-F and 250-F bolted flange, CF 10” flange |
19 (41.8) 19.4 (43.0) 25.5 (54.2) 21.2 (46.6) 25.5 (54.2) |
||
*According to standard DIN 28 428
Note: The pump is available with On-board Navigator Controller, 1/4Rack Controller or PCB Controller.
Ordering Details
| Description | Weight Kg (Lbs) | Part Number |
|
Turbo-V 1001 Pump Complete Systems |
||
| Turbo-V 1001 Navigator complete system, ISO 160 flange | 24.4 (53.8) | 9698840 |
| Turbo-V 1001 Navigator complete system, ISO 200 flange | 24.8 (55.0) | 9698838 |
| Turbo-V 1001 Navigator complete system, ISO 200-F bolted flange | 30.9 (66.2) | 9698844 |
| Turbo-V 1001 Navigator complete system, 10 CF flange | 30.9 (66.2) | 9698839 |
| Turbo-V 1001 Navigator complete system, ISO 250 flange | 26.6 (58.6) | 9698841 |
| Turbo-V 1001 Navigator complete system, ISO 250-F bolted flange | 30.9 (66.2) | 9698845 |
| Complete system includes: Pump, Inlet screen, Controller mounted on the bottom, 2 Mains cables (NEMA plug and European plug). | ||
| Pumps | ||
| Turbo-V 1001 Navigator pump, ISO 160 flange | 19.0 (41.8) | 9698933 |
| Turbo-V 1001 Navigator pump, ISO 200 flange | 19.4 (43.0) | 9698931 |
| Turbo-V 1001 Navigator pump, ISO 200-F bolted flange | 25.5 (54.2) | 9698946 |
| Turbo-V 1001 Navigator pump, 10 CF flange | 25.5 (54.2) | 9698932 |
| Turbo-V 1001 Navigator pump, ISO 250 flange | 21.2 (46.6) | 9698934 |
| Turbo-V 1001 Navigator pump, ISO 250-F bolted flange | 25.5 (54.2) | 9698947 |
| Controllers* | ||
| Turbo-V 1001 Navigator controller 120/220 V - 50/60 Hz | 5.4 (12.0) | 9698978 |
| Turbo-V 1000HT Rack controller, 220 V | 15.7 (35.0) | 9699454 |
| Turbo-V 1000HT Rack controller, 110 V | 15.7 (35.0) | 9699554 |
| Pump Accessories | ||
| Mains cable NEMA plug, 3 m long | 0.5 (1.0) | 9699958 |
| Mains cable European plug, 3 m long | 0.5 (1.0) | 9699957 |
|
Serial cable and T-plus Software (previous release Navigator 2.2 included in the CD) |
0.5 (1.0) | 9699883 |
| Inlet screen DN 160 | 0.5 (1.0) | 9699304 |
| Inlet screen DN 200 | 0.5 (1.0) | 9699316 |
| Inlet screen DN 250 | 0.5 (1.0) | 9699350 |
| Heater band, 220 V | 1.0 (2.0) | 9699327 |
| Heater band, 120 V | 1.0 (2.0) | 9699317 |
| Water cooling kit | 0.5 (1.0) | 9699337 |
| Plastic water cooling kit | 0.5 (1.0) | 9699347 |
| Air cooling kit for use with Navigator controller | 5.0 (10.0) | 9699297 |
| Air cooling kit for use with standard rack controller | 3.0 (7.0) | 9699315 |
| Bracket for Navigator controller side mounting | 2.0 (4.0) | 9699298 |
| Vibration damper, ISO 160 | 4.0 (9.0) | 9699345 |
| Vibration damper, ISO 200 | 5.0 (10.0) | 9699346 |
| Vibration damper, CF 10 | 5.0 (10.0) | 9699336 |
| Vent flange, NW 10 KF / M8 | 0.5 (1.0) | 9699108 |
| Vent device with adjustable delay time for standard rack controller | 2.0 (4.0) | 9699831 |
| Vent valve for standard rack controller | 2.0 (4.0) | 9699843 |
| Vent valve for Navigator controller | 2.0 (4.0) | 9699834 |
| Purge valve 10 SCCM NW16KF M12 | 0.2 (0.5) | 9699239 |
| Purge valve 10 SCCM 1 4 Swagelok M12 | 0.2 (0.5) | 9699240 |
| Purge valve 20 SCCM NW16KF M12 | 0.2 (0.5) | 9699241 |
| Purge valve 20 SCCM 1 4 Swagelok M12 | 0.2 (0.5) | 9699242 |
| Purge valve 10 SCCM 1 4 Swagelok 1 4 Swagelok | 0.2 (0.5) | 9699232 |
| Purge Valve 20 SCCM 1 4 Swagelok 1 4 Swagelok | 0.2 (0.5) | 9699236 |
Outline Drawing
US 1365 
MY 323 
CN 309 
AP 130 
AU 75 
IE 43 
CA 31 
SG 30 
